APA (7th ed.) Citation

Gu, Z. Surface Scattering and Diffraction for Advanced Metrology. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Gu, Zu-Han. Surface Scattering and Diffraction for Advanced Metrology. SPIE Digital Library.

MLA (8th ed.) Citation

Gu, Zu-Han. Surface Scattering and Diffraction for Advanced Metrology. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.