APA (7th ed.) Citation

Bergmann, N. Electronics and Structures for MEMS II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Bergmann, Neil. Electronics and Structures for MEMS II. SPIE Digital Library.

MLA (8th ed.) Citation

Bergmann, Neil. Electronics and Structures for MEMS II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.