APA (7th ed.) Citation

Engelstad, R. Emerging Lithographic Technologies VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Engelstad, Roxann. Emerging Lithographic Technologies VI. SPIE Digital Library.

MLA (8th ed.) Citation

Engelstad, Roxann. Emerging Lithographic Technologies VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.