APA (7th ed.) Citation

Herr, D. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

MLA (8th ed.) Citation

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.