APA (7th ed.) Citation

Yen, A. Optical Microlithography XV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Yen, Anthony. Optical Microlithography XV. SPIE Digital Library.

MLA (8th ed.) Citation

Yen, Anthony. Optical Microlithography XV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.