APA (7th ed.) Citation

Starikov, A. Design and Process Integration for Microelectronic Manufacturing. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Design and Process Integration for Microelectronic Manufacturing. SPIE Digital Library.

MLA (8th ed.) Citation

Starikov, Alexander. Design and Process Integration for Microelectronic Manufacturing. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.