APA (7th ed.) Citation

Tanabe, H. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

MLA (8th ed.) Citation

Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.