APA (7th ed.) Citation

Janson, S. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.

MLA (8th ed.) Citation

Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.