APA (7th ed.) Citation

Komuro, M. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Komuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.

MLA (8th ed.) Citation

Komuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.