Mack, C. A. Field Guide to Optical Lithography. SPIE Digital Library.
Chicago Style (17th ed.) CitationMack, Chris A. Field Guide to Optical Lithography. SPIE Digital Library.
MLA (8th ed.) CitationMack, Chris A. Field Guide to Optical Lithography. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.