APA (7th ed.) Citation

Houga, M. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Houga, Morihisa. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.

MLA (8th ed.) Citation

Houga, Morihisa. Photomask and Next-Generation Lithography Mask Technology XIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.