APA (7th ed.) Citation

Chiao, J. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.

MLA (8th ed.) Citation

Chiao, Jung-Chih. Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.