APA (7th ed.) Citation

Hartzell, A. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.

MLA (8th ed.) Citation

Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.