APA (7th ed.) Citation

Lercel, M. Emerging Lithographic Technologies XI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Lercel, Michael. Emerging Lithographic Technologies XI. SPIE Digital Library.

MLA (8th ed.) Citation

Lercel, Michael. Emerging Lithographic Technologies XI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.