APA (7th ed.) Citation

Becker, T. Smart Sensors, Actuators, and MEMS III. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Becker, Thomas. Smart Sensors, Actuators, and MEMS III. SPIE Digital Library.

MLA (8th ed.) Citation

Becker, Thomas. Smart Sensors, Actuators, and MEMS III. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.