APA (7th ed.) Citation

Tan, H. H. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.

MLA (8th ed.) Citation

Tan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.