APA (7th ed.) Citation

Schellenberg, F. Emerging Lithographic Technologies XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Schellenberg, Frank. Emerging Lithographic Technologies XII. SPIE Digital Library.

MLA (8th ed.) Citation

Schellenberg, Frank. Emerging Lithographic Technologies XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.