APA (7th ed.) Citation

Henderson, C. Advances in Resist Materials and Processing Technology XXV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Henderson, Clifford. Advances in Resist Materials and Processing Technology XXV. SPIE Digital Library.

MLA (8th ed.) Citation

Henderson, Clifford. Advances in Resist Materials and Processing Technology XXV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.