APA (7th ed.) Citation

Gorecki, C. Optical Micro- and Nanometrology in Microsystems Technology II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Gorecki, Christophe. Optical Micro- and Nanometrology in Microsystems Technology II. SPIE Digital Library.

MLA (8th ed.) Citation

Gorecki, Christophe. Optical Micro- and Nanometrology in Microsystems Technology II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.