APA (7th ed.) Citation

Allgair, J. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

MLA (8th ed.) Citation

Allgair, John. Metrology, Inspection, and Process Control for Microlithography XXIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.