APA (7th ed.) Citation

Behringer, U. 26th European Mask and Lithography Conference. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. 26th European Mask and Lithography Conference. SPIE Digital Library.

MLA (8th ed.) Citation

Behringer, Uwe. 26th European Mask and Lithography Conference. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.