Rai-Choudhury, P. (2009). Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE. https://doi.org/10.1117/3.2265071
Chicago-viite (17. p.)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE, 2009. https://doi.org/10.1117/3.2265071.
MLA-viite (8. p.)Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication. SPIE, 2009. https://doi.org/10.1117/3.2265071.
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