Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
| Autor principal: | |
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| Format: | Electrònic eBook |
| Idioma: | English |
| Publicat: |
SPIE,
2009
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| Matèries: | |
| Accés en línia: | Full text available on SPIE Digital Library Off-campus access |
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per Rai-Choudhury, Prosenjit
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