APA (7th ed.) Citation

Rai-Choudhury, P. (2009). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE. https://doi.org/10.1117/3.2265070

Chicago Style (17th ed.) Citation

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE, 2009. https://doi.org/10.1117/3.2265070.

MLA (8th ed.) Citation

Rai-Choudhury, Prosenjit. Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE, 2009. https://doi.org/10.1117/3.2265070.

Warning: These citations may not always be 100% accurate.