Advanced Processes for 193-nm Immersion Lithography
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
SPIE,
2009
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| Subjects: | |
| Online Access: | Full text available on SPIE Digital Library Off-campus access |
| Item Description: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Physical Description: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819475572 9780819478436 |
| DOI: | 10.1117/3.820233 |
| Access: | Electronic access restricted to authorized BRAC University faculty, staff and students |