APA (7th ed.) Citation

Bakshi, V. (2009). EUV Lithography. SPIE. https://doi.org/10.1117/3.769214

Chicago Style (17th ed.) Citation

Bakshi, Vivek. EUV Lithography. SPIE, 2009. https://doi.org/10.1117/3.769214.

MLA (8th ed.) Citation

Bakshi, Vivek. EUV Lithography. SPIE, 2009. https://doi.org/10.1117/3.769214.

Warning: These citations may not always be 100% accurate.