APA (7th ed.) Citation

Su, B. (2015). Introduction to Metrology Applications in IC Manufacturing. SPIE. https://doi.org/10.1117/3.2197207

Chicago Style (17th ed.) Citation

Su, Bo. Introduction to Metrology Applications in IC Manufacturing. SPIE, 2015. https://doi.org/10.1117/3.2197207.

MLA (8th ed.) Citation

Su, Bo. Introduction to Metrology Applications in IC Manufacturing. SPIE, 2015. https://doi.org/10.1117/3.2197207.

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