Cita APA (7th ed.)

Xiao, H. (2012). Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE. https://doi.org/10.1117/3.924283

Cita Chicago (17th ed.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE, 2012. https://doi.org/10.1117/3.924283.

Cita MLA (8th ed.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology, 2nd Ed. SPIE, 2012. https://doi.org/10.1117/3.924283.