APA (7th ed.) Citation

Levinson, H. J. (2020). Extreme Ultraviolet Lithography. SPIE. https://doi.org/10.1117/3.2581446

Chicago Style (17th ed.) Citation

Levinson, Harry J. Extreme Ultraviolet Lithography. SPIE, 2020. https://doi.org/10.1117/3.2581446.

MLA (8th ed.) Citation

Levinson, Harry J. Extreme Ultraviolet Lithography. SPIE, 2020. https://doi.org/10.1117/3.2581446.

Warning: These citations may not always be 100% accurate.