APA (7th ed.) Citation

Levinson, H. J. (2009). Lithography Process Control. SPIE. https://doi.org/10.1117/3.322162

Chicago Style (17th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE, 2009. https://doi.org/10.1117/3.322162.

MLA (8th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE, 2009. https://doi.org/10.1117/3.322162.

Warning: These citations may not always be 100% accurate.