Motamedi, M. (2009). MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE. https://doi.org/10.1117/3.2265061
Chicago Style (17th ed.) CitationMotamedi, Manouchehr. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE, 2009. https://doi.org/10.1117/3.2265061.
MLA (8th ed.) CitationMotamedi, Manouchehr. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE, 2009. https://doi.org/10.1117/3.2265061.
Warning: These citations may not always be 100% accurate.