Wong, A. K. K. (2009). Optical Imaging in Projection Microlithography. SPIE. https://doi.org/10.1117/3.612961
Citación estilo ChicagoWong, Alfred K. K. Optical Imaging in Projection Microlithography. SPIE, 2009. https://doi.org/10.1117/3.612961.
Cita MLAWong, Alfred K. K. Optical Imaging in Projection Microlithography. SPIE, 2009. https://doi.org/10.1117/3.612961.
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