Optical Imaging in Projection Microlithography
| Autor Principal: | |
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| Formato: | Electrónico eBook |
| Idioma: | English |
| Publicado: |
SPIE,
2009
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| Subjects: | |
| Acceso en liña: | Full text available on SPIE Digital Library Off-campus access |
| descrición da copia: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Descrición Física: | 1 online resource |
| Formato: | Mode of access: Internet |
| ISBN: | 9780819458292 9780819478702 |
| DOI: | 10.1117/3.612961 |
| Acceso: | Electronic access restricted to authorized BRAC University faculty, staff and students |