Burn, J. L. (2021). Optical Lithography: Here is Why, Second Edition. SPIE. https://doi.org/10.1117/3.2586123
Chicagoスタイル(17版)引用形式Burn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE, 2021. https://doi.org/10.1117/3.2586123.
MLA(8版)引用形式Burn, J. Lin. Optical Lithography: Here Is Why, Second Edition. SPIE, 2021. https://doi.org/10.1117/3.2586123.
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