APA (7th ed.) Citation

Yen, A. (2018). Optical Physics for Nanolithography. SPIE. https://doi.org/10.1117/3.2314953

Chicago Style (17th ed.) Citation

Yen, Anthony. Optical Physics for Nanolithography. SPIE, 2018. https://doi.org/10.1117/3.2314953.

MLA (8th ed.) Citation

Yen, Anthony. Optical Physics for Nanolithography. SPIE, 2018. https://doi.org/10.1117/3.2314953.

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