APA (7th ed.) Citation

Levinson, H. J. (2019). Principles of Lithography, Fourth Edition. SPIE. https://doi.org/10.1117/3.2525393

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography, Fourth Edition. SPIE, 2019. https://doi.org/10.1117/3.2525393.

MLA (8th ed.) Citation

Levinson, Harry J. Principles of Lithography, Fourth Edition. SPIE, 2019. https://doi.org/10.1117/3.2525393.

Warning: These citations may not always be 100% accurate.