APA (7th ed.) Citation

Wong, A. K. (2009). Resolution Enhancement Techniques in Optical Lithography. SPIE. https://doi.org/10.1117/3.401208

Chicago Style (17th ed.) Citation

Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.

MLA (8th ed.) Citation

Wong, Alfred Kwok-Kit. Resolution Enhancement Techniques in Optical Lithography. SPIE, 2009. https://doi.org/10.1117/3.401208.

Warning: These citations may not always be 100% accurate.