Journal of Microlithography, Microfabrication, and Microsystems. SPIE.
Chicago Style (17th ed.) CitationJournal of Microlithography, Microfabrication, and Microsystems. SPIE.
MLA (8th ed.) CitationJournal of Microlithography, Microfabrication, and Microsystems. SPIE.
Warning: These citations may not always be 100% accurate.