APA (7th ed.) Citation

Journal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.

Chicago Style (17th ed.) Citation

Journal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.

MLA (8th ed.) Citation

Journal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.

Warning: These citations may not always be 100% accurate.