Journal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.
Chicago Style (17th ed.) CitationJournal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.
MLA (8th ed.) CitationJournal of Micro/Nanolithography, MEMS, and MOEMS. SPIE.
Warning: These citations may not always be 100% accurate.