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    Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
    by Rai-Choudhury, Prosenjit
    Published 2009
    Off-Campus Access: Athens ID and Password Required
    On-Campus Access: No User ID or Password Required
    Full text available on SPIE Digital Library
    Off-campus access
    Electronic eBook
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