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  1. 1
    Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
    nork Rai-Choudhury, Prosenjit
    Argitaratua 2009
    Off-Campus Access: Athens ID and Password Required
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    Full text available on SPIE Digital Library
    Off-campus access
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  2. 2
    Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography
    nork Rai-Choudhury, Prosenjit
    On-Campus Access Only (IP based access)
    Full text available on Research4Life (SPIE Digital Library)
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