Advanced Etch Technology and Process Integration for Nanopatterning XI
| Outros Autores: | |
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| Formato: | Recurso Electrónico Livro |
| Idioma: | English |
| Publicado em: |
SPIE Digital Library,
1/1/22
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| Assuntos: | |
| Acesso em linha: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Descrição do item: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Descrição Física: | 1 online resource |
| Formato: | Mode of access: Internet |
| ISBN: | 9781510649873 9781510649880 |
| Acesso: | Electronic access restricted to authorized BRAC University faculty, staff and students |