MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications

Показати інші версії (1)

Бібліографічні деталі
Автор:	Rai-Choudhury, Prosenjit
Формат:	Електронний ресурс Книга
Мова:	English
Опубліковано:	SPIE Digital Library, 1/1/00
Предмети:	Conference papers and proceedings.
Онлайн доступ:	Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue:	View this record in Classic Catalogue

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MEMS and MOEMS Technology and Applications
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