Handbook of Microlithography, Micromachining, and Microfabrication, Volume 2: Micromachining and Microfabrication
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| Format: | Elektronski eKnjiga |
| Jezik: | English |
| Izdano: |
SPIE,
2009
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| Teme: | |
| Online dostop: | Full text available on SPIE Digital Library Off-campus access |
| Opis knjige/članka: | <strong>Off-Campus Access:</strong> Athens ID and Password Required <strong>On-Campus Access:</strong> No User ID or Password Required |
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| Fizični opis: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819423795 9781510607972 |
| DOI: | 10.1117/3.2265071 |
| Dostop: | Electronic access restricted to authorized BRAC University faculty, staff and students |